Advanced MEMS Packaging

Released on by John H. Lau
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  • Advanced MEMS Packaging Book Detail

  • Author : John H. Lau
  • Release Date : 2009-10-22
  • Publisher : McGraw Hill Professional
  • Genre : Technology & Engineering
  • Pages : 577
  • ISBN 13 : 0071627928
  • File Size : 38,38 MB
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Advanced MEMS Packaging by John H. Lau PDF Summary

Book Description: A comprehensive guide to 3D MEMS packaging methods and solutions Written by experts in the field, Advanced MEMS Packaging serves as a valuable reference for those faced with the challenges created by the ever-increasing interest in MEMS devices and packaging. This authoritative guide presents cutting-edge MEMS (microelectromechanical systems) packaging techniques, such as low-temperature C2W and W2W bonding and 3D packaging. This definitive resource helps you select reliable, creative, high-performance, robust, and cost-effective packaging techniques for MEMS devices. The book will also aid in stimulating further research and development in electrical, optical, mechanical, and thermal designs as well as materials, processes, manufacturing, testing, and reliability. Among the topics explored: Advanced IC and MEMS packaging trends MEMS devices, commercial applications, and markets More than 360 MEMS packaging patents and 10 3D MEMS packaging designs TSV for 3D MEMS packaging MEMS wafer thinning, dicing, and handling Low-temperature C2C, C2W, and W2W bonding Reliability of RoHS-compliant MEMS packaging Micromachining and water bonding techniques Actuation mechanisms and integrated micromachining Bubble switch, optical switch, and VOA MEMS packaging Bolometer and accelerameter MEMS packaging Bio-MEMS and biosensor MEMS packaging RF MEMS switches, tunable circuits, and packaging

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Advanced MEMS Packaging

Advanced MEMS Packaging

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A comprehensive guide to 3D MEMS packaging methods and solutions Written by experts in the field, Advanced MEMS Packaging serves as a valuable reference for tho

Mems Packaging

Mems Packaging

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MEMS sensors and actuators are enabling components for smartphones, AR/VR, and wearable electronics. MEMS packaging is recognized as one of the most critical ac

Materials for Advanced Packaging

Materials for Advanced Packaging

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Significant progress has been made in advanced packaging in recent years. Several new packaging techniques have been developed and new packaging materials have