Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

Released on by Kenichi Takahata
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  • Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies Book Detail

  • Author : Kenichi Takahata
  • Release Date : 2013-05-29
  • Publisher : BoD – Books on Demand
  • Genre : Science
  • Pages : 238
  • ISBN 13 : 9535110853
  • File Size : 16,16 MB
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Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies by Kenichi Takahata PDF Summary

Book Description: MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.

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Advanced MEMS/NEMS Fabrication and Sensors

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Micro and Nano Fabrication

Micro and Nano Fabrication

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book prov

MEMS and NEMS

MEMS and NEMS

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The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every