Handbook of Silicon Semiconductor Metrology

Released on by Alain C. Diebold
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  • Handbook of Silicon Semiconductor Metrology Book Detail

  • Author : Alain C. Diebold
  • Release Date : 2001-06-29
  • Publisher : CRC Press
  • Genre : Technology & Engineering
  • Pages : 703
  • ISBN 13 : 0203904540
  • File Size : 74,74 MB
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Handbook of Silicon Semiconductor Metrology by Alain C. Diebold PDF Summary

Book Description: Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay

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Ellipsometry at the Nanoscale

Ellipsometry at the Nanoscale

File Size : 47,47 MB
Total View : 610 Views
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This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materi