Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses

Released on by Christopher Lyle Borst
preview-18

  • Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses Book Detail

  • Author : Christopher Lyle Borst
  • Release Date : 2013-11-27
  • Publisher : Springer Science & Business Media
  • Genre : Technology & Engineering
  • Pages : 235
  • ISBN 13 : 1461511658
  • File Size : 9,9 MB
DOWNLOAD BOOK

Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses by Christopher Lyle Borst PDF Summary

Book Description: As semiconductor manufacturers implement copper conductors in advanced interconnect schemes, research and development efforts shift toward the selection of an insulator that can take maximum advantage of the lower power and faster signal propagation allowed by copper interconnects. One of the main challenges to integrating a low-dielectric constant (low-kappa) insulator as a replacement for silicon dioxide is the behavior of such materials during the chemical-mechanical planarization (CMP) process used in Damascene patterning. Low-kappa dielectrics tend to be softer and less chemically reactive than silicon dioxide, providing significant challenges to successful removal and planarization of such materials. The focus of this book is to merge the complex CMP models and mechanisms that have evolved in the past decade with recent experimental results with copper and low-kappa CMP to develop a comprehensive mechanism for low- and high-removal-rate processes. The result is a more in-depth look into the fundamental reaction kinetics that alter, selectively consume, and ultimately planarize a multi-material structure during Damascene patterning.

Disclaimer: www.yourbookbest.com does not own Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses books pdf, neither created or scanned. We just provide the link that is already available on the internet, public domain and in Google Drive. If any way it violates the law or has any issues, then kindly mail us via contact us page to request the removal of the link.

Polymers in Organic Electronics

Polymers in Organic Electronics

File Size : 89,89 MB
Total View : 7450 Views
DOWNLOAD

Polymers in Organic Electronics: Polymer Selection for Electronic, Mechatronic, and Optoelectronic Systems provides readers with vital data, guidelines, and tec