High Density Plasma Sources

Released on by Oleg A. Popov
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  • High Density Plasma Sources Book Detail

  • Author : Oleg A. Popov
  • Release Date : 1996-12-31
  • Publisher : Elsevier
  • Genre : Science
  • Pages : 467
  • ISBN 13 : 0815517890
  • File Size : 45,45 MB
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High Density Plasma Sources by Oleg A. Popov PDF Summary

Book Description: This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.

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High Density Plasma Sources

High Density Plasma Sources

File Size : 95,95 MB
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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing,

High Density Plasma Sources

High Density Plasma Sources

File Size : 30,30 MB
Total View : 6424 Views
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This book presents a comprehensive description of the most promising high density plasma sources operated at low and intermediate pressures which are used, or c