Efficient Electrical Transduction of All-silicon Contour Mode Micromechanical Resonators

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  • Efficient Electrical Transduction of All-silicon Contour Mode Micromechanical Resonators Book Detail

  • Author :
  • Release Date : 2013
  • Publisher :
  • Genre : Electric resonators
  • Pages : 332
  • ISBN 13 :
  • File Size : 92,92 MB

Efficient Electrical Transduction of All-silicon Contour Mode Micromechanical Resonators by PDF Summary

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Capacitive Silicon Resonators

Capacitive Silicon Resonators

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Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering application