Electrochemical Processing in ULSI and MEMS 3

Released on by John O. Dukovic
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  • Electrochemical Processing in ULSI and MEMS 3 Book Detail

  • Author : John O. Dukovic
  • Release Date : 2007-09
  • Publisher : The Electrochemical Society
  • Genre : Science
  • Pages : 288
  • ISBN 13 : 1566775868
  • File Size : 78,78 MB
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Electrochemical Processing in ULSI and MEMS 3 by John O. Dukovic PDF Summary

Book Description: The papers in this issue describe the latest advances in fundamental and practical aspects of electrochemical processes for fabrication of microelectronic devices and related structures. Topics range from plating to etching, chips to packages, mechanisms to models, through-silicon vias to nanotubes, tin to ruthenium, capping to cooling, porous gold to porous alumina, probe-card springs to solder balls, electroless deposition to CMP, TFT-LCDs to magnetic nanowires and beyond.

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