Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

Released on by Eric Garfunkel
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  • Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices Book Detail

  • Author : Eric Garfunkel
  • Release Date : 2012-12-06
  • Publisher : Springer Science & Business Media
  • Genre : Technology & Engineering
  • Pages : 503
  • ISBN 13 : 9401150087
  • File Size : 57,57 MB
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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices by Eric Garfunkel PDF Summary

Book Description: An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.

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The main goal of this book is to review at the nano and atomic scale the very complex scientific issues that pertain to the use of advanced high dielectric cons