Fabrication of a Novel Optical Pressure Sensor Using Fabry-Perot Interferometry

Fabrication of a Novel Optical Pressure Sensor Using Fabry-Perot Interferometry

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Fiber-Optic Fabry-Perot Sensors

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The authors deliver a complete overview of fiber-optic Fabry-Perot (FFP) sensing technology, integrating the knowledge and tools of multiple fields including op

MEMS Based Fabry Perot Pressure Sensor and Non-adhesive Integration on Optical Fiber by Anodic Bonding

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Optical pressure sensor based on the principle of Fabry Perot interferometry have been developed and fabricated using the technique of silicon-to-silicon anodic

Integration of Electronic and Optical Techniques in the Design and Fabrication of Pressure Sensors

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Since the introduction of micro-electro-mechanical systems fabrication methods, piezoresistive pressure sensors have become the more popular pressure transducer

Study of a MEMS Fiber-optic Pressure Sensor Based on Optical Interferometry

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The main focus of this thesis is the development of a MEMS optical pressure sensor capable of giving real-time, accurate measurements to a mid-high pressure ran