Field Guide to Optical Lithography

Released on by Chris A. Mack
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  • Field Guide to Optical Lithography Book Detail

  • Author : Chris A. Mack
  • Release Date : 2006
  • Publisher : Society of Photo Optical
  • Genre : Technology & Engineering
  • Pages : 122
  • ISBN 13 : 9780819462077
  • File Size : 58,58 MB
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Field Guide to Optical Lithography by Chris A. Mack PDF Summary

Book Description: This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. It details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.

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