Silicon-on-insulator Technology and Devices XII

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  • Silicon-on-insulator Technology and Devices XII Book Detail

  • Author : George K. Celler
  • Release Date : 2005
  • Publisher : The Electrochemical Society
  • Genre : Technology & Engineering
  • Pages : 412
  • ISBN 13 : 9781566774611
  • File Size : 98,98 MB

Silicon-on-insulator Technology and Devices XII by George K. Celler PDF Summary

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The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. T