Handbook of Sputter Deposition Technology

Released on by Kiyotaka Wasa
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  • Handbook of Sputter Deposition Technology Book Detail

  • Author : Kiyotaka Wasa
  • Release Date : 2012-11-20
  • Publisher : William Andrew
  • Genre : Science
  • Pages : 658
  • ISBN 13 : 1437734839
  • File Size : 66,66 MB
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Handbook of Sputter Deposition Technology by Kiyotaka Wasa PDF Summary

Book Description: This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere

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Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology

File Size : 2,2 MB
Total View : 6499 Views
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This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputt

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology

File Size : 95,95 MB
Total View : 2623 Views
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A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade. Cathode sputtering is widely use