High Dielectric Constant Materials

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  • High Dielectric Constant Materials Book Detail

  • Author : Howard Huff
  • Release Date : 2005
  • Publisher : Springer Science & Business Media
  • Genre : Science
  • Pages : 740
  • ISBN 13 : 9783540210818
  • File Size : 11,11 MB

High Dielectric Constant Materials by Howard Huff PDF Summary

Book Description: Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology. Topics include: an extensive review of Moore's Law, the classical regime for SiO2 gate dielectrics; the transition to silicon oxynitride gate dielectrics; the transition to high-K gate dielectrics (including the drive towards equivalent oxide thickness in the single-digit nanometer regime); and future directions and issues for ultimate technology generation scaling. The vision, wisdom, and experience of the team of authors will make this book a timely, relevant, and interesting, resource focusing on fundamentals of the 45 nm Technology Generation and beyond.

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High Dielectric Constant Materials

High Dielectric Constant Materials

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Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). Mor

High Dielectric Constant Materials

High Dielectric Constant Materials

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Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). Mor

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Low and High Dielectric Constant Materials

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Contains papers from a May 2000 symposium, representing the state of the art in areas of dielectric materials science and process integration. Papers are arrang

High Permittivity Gate Dielectric Materials

High Permittivity Gate Dielectric Materials

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"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, includ