High-k Gate Dielectrics for CMOS Technology

Released on by Gang He
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  • High-k Gate Dielectrics for CMOS Technology Book Detail

  • Author : Gang He
  • Release Date : 2012-08-10
  • Publisher : John Wiley & Sons
  • Genre : Technology & Engineering
  • Pages : 560
  • ISBN 13 : 3527646361
  • File Size : 84,84 MB
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High-k Gate Dielectrics for CMOS Technology by Gang He PDF Summary

Book Description: A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies. Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.

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