Intelligent Modeling, Diagnosis and Control of Manufacturing Processes

Released on by Bei-Tseng Bill Chu
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  • Intelligent Modeling, Diagnosis and Control of Manufacturing Processes Book Detail

  • Author : Bei-Tseng Bill Chu
  • Release Date : 1992
  • Publisher : World Scientific Publishing Company Incorporated
  • Genre : Technology & Engineering
  • Pages : 263
  • ISBN 13 : 9789810208172
  • File Size : 14,14 MB
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Intelligent Modeling, Diagnosis and Control of Manufacturing Processes by Bei-Tseng Bill Chu PDF Summary

Book Description: 1. Manufacturing diagnosis and control: a task-specific approach / W.F. Punch III, A.K. Goel and J. Sticklen -- 2. The theory and application of diagnostic and control expert system based on plant model / J. Suzuki and M. Iwamasa -- 3. Integrated problem solving for the diagnosis of interacting process malfunctions / J.K. McDowell and J.F. Davis -- 4. A neural network model for diagnostic problem solving / Y. Peng and J.A. Reggia -- 5. Process control system for VLSI fabrication / E. Sachs [und weitere] -- 6. Development and application of equipment-specific process models for semiconductor manufacturing / K.-K. Lin and C. Spanos -- 7. Continuous equipment diagnosis using evidence integration - an LPCVD application / N.H. Chang, and C. Spanos -- 8. Equipment/instrument diagnosis with continuous and discrete causal relationships / B.-T.B. Chu -- 9. Intelligent control of semiconductor manufacturing processes / S.-S. Chen -- 10. A machine learning approach to diagnosis and control with applications in semiconductor manufacturing / K.B. Irani [und weitere]

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