Introduction to Focused Ion Beam Nanometrology

Released on by David C. Cox
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  • Introduction to Focused Ion Beam Nanometrology Book Detail

  • Author : David C. Cox
  • Release Date : 2015-10-01
  • Publisher : Morgan & Claypool Publishers
  • Genre : Technology & Engineering
  • Pages : 119
  • ISBN 13 : 1681741482
  • File Size : 34,34 MB
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Introduction to Focused Ion Beam Nanometrology by David C. Cox PDF Summary

Book Description: This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.

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Introduction to Focused Ion Beams

Introduction to Focused Ion Beams

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Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related t