Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c
During the years since the first conference in this series was held at Thousand Oaks, California, in 1970, ion implantation has been an expanding and exciting r
Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo
"New results in the field of ion implantation from the experienced scientists from different countries are presented in this book. Influence of ion implantation
Ion beam processing is a means of producing both novel materials and structures. The contributions in this volume strongly focus on this aspect and include many
