Ion Implantation, Annealing, Charact4rization and Device Development in Beta-silicon Carbide Single Crystalline Thin Films

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  • Ion Implantation, Annealing, Charact4rization and Device Development in Beta-silicon Carbide Single Crystalline Thin Films Book Detail

  • Author : Jaesok Ryu
  • Release Date : 1986
  • Publisher :
  • Genre :
  • Pages : 464
  • ISBN 13 :
  • File Size : 81,81 MB

Ion Implantation, Annealing, Charact4rization and Device Development in Beta-silicon Carbide Single Crystalline Thin Films by Jaesok Ryu PDF Summary

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