Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c
In recent years, ion implantation has developed into the major doping technique for integrated circuits. Several series of conferences have dealt with the appli
Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. T
Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is
Comprehensive guide to an important materials science technique for students and researchers.
