Wafer Bonding

Released on by Marin Alexe
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  • Wafer Bonding Book Detail

  • Author : Marin Alexe
  • Release Date : 2013-03-09
  • Publisher : Springer Science & Business Media
  • Genre : Science
  • Pages : 510
  • ISBN 13 : 3662108275
  • File Size : 2,2 MB
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Wafer Bonding by Marin Alexe PDF Summary

Book Description: The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

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Wafer Bonding

Wafer Bonding

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The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration