Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

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  • Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon Book Detail

  • Author : Krishna Seshan
  • Release Date : 2002-02-01
  • Publisher : CRC Press
  • Genre : Science
  • Pages : 72
  • ISBN 13 : 1482269686
  • File Size : 46,46 MB

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon by Krishna Seshan PDF Summary

Book Description: The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec

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Handbook of Thin Film Deposition

Handbook of Thin Film Deposition

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New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor an