MEMS Reliability

Released on by Allyson L. Hartzell
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  • MEMS Reliability Book Detail

  • Author : Allyson L. Hartzell
  • Release Date : 2010-11-02
  • Publisher : Springer Science & Business Media
  • Genre : Technology & Engineering
  • Pages : 300
  • ISBN 13 : 144196018X
  • File Size : 26,26 MB
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MEMS Reliability by Allyson L. Hartzell PDF Summary

Book Description: The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.

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This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, compon

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the