Microsystem Technology

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  • Microsystem Technology Book Detail

  • Author : Wolfgang Menz
  • Release Date : 2008-07-11
  • Publisher : John Wiley & Sons
  • Genre : Technology & Engineering
  • Pages : 512
  • ISBN 13 : 3527613013
  • File Size : 76,76 MB

Microsystem Technology by Wolfgang Menz PDF Summary

Book Description: This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

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Microsystem Technology

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This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipli

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct fu

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Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunit