Nanopositioning Technologies

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  • Nanopositioning Technologies Book Detail

  • Author : Changhai Ru
  • Release Date : 2015-12-22
  • Publisher : Springer
  • Genre : Technology & Engineering
  • Pages : 412
  • ISBN 13 : 3319238531
  • File Size : 22,22 MB

Nanopositioning Technologies by Changhai Ru PDF Summary

Book Description: This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

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Nanopositioning Technologies

Nanopositioning Technologies

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This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuator

Optical Nano and Micro Actuator Technology

Optical Nano and Micro Actuator Technology

File Size : 48,48 MB
Total View : 869 Views
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In Optical Nano and Micro Actuator Technology, leading engineers, material scientists, chemists, physicists, laser scientists, and manufacturing specialists off