Chemical Vapour Deposition

Released on by Anthony C. Jones
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  • Chemical Vapour Deposition Book Detail

  • Author : Anthony C. Jones
  • Release Date : 2009
  • Publisher : Royal Society of Chemistry
  • Genre : Science
  • Pages : 600
  • ISBN 13 : 0854044655
  • File Size : 7,7 MB
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Chemical Vapour Deposition by Anthony C. Jones PDF Summary

Book Description: "The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket

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