ULSI Process Integration II

Released on by Cor L. Claeys
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  • ULSI Process Integration II Book Detail

  • Author : Cor L. Claeys
  • Release Date : 2001
  • Publisher : The Electrochemical Society
  • Genre : Technology & Engineering
  • Pages : 636
  • ISBN 13 : 9781566773089
  • File Size : 65,65 MB
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ULSI Process Integration II by Cor L. Claeys PDF Summary

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Microelectronic Materials and Processes

Microelectronic Materials and Processes

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The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher speed, and consume lower

Characterization in Silicon Processing

Characterization in Silicon Processing

File Size : 10,10 MB
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This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor