Fundamentals of Semiconductor Processing Technology

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  • Fundamentals of Semiconductor Processing Technology Book Detail

  • Author : Badih El-Kareh
  • Release Date : 2012-12-06
  • Publisher : Springer Science & Business Media
  • Genre : Technology & Engineering
  • Pages : 605
  • ISBN 13 : 1461522099
  • File Size : 1,1 MB

Fundamentals of Semiconductor Processing Technology by Badih El-Kareh PDF Summary

Book Description: The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufac turing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabil ities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modem tech nologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semi conductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and cir cuits, their electrical parameters, reliability, and yield.

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Dry Etching Technology for Semiconductors

Dry Etching Technology for Semiconductors

File Size : 3,3 MB
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This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniat