Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry

Released on by OECD
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  • Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry Book Detail

  • Author : OECD
  • Release Date : 2015-04-03
  • Publisher : OECD Publishing
  • Genre :
  • Pages : 80
  • ISBN 13 : 9264502432
  • File Size : 41,41 MB
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Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry by OECD PDF Summary

Book Description: This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors.

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