Silicon Anodization as a Structuring Technique

Released on by Alexey Ivanov
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  • Silicon Anodization as a Structuring Technique Book Detail

  • Author : Alexey Ivanov
  • Release Date : 2017-09-10
  • Publisher : Springer
  • Genre : Technology & Engineering
  • Pages : 335
  • ISBN 13 : 3658192380
  • File Size : 25,25 MB
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Silicon Anodization as a Structuring Technique by Alexey Ivanov PDF Summary

Book Description: Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. ​

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