Silicon Carbide Micro Electromechanical Systems for Harsh Environments

Released on by Rebecca Cheung
preview-18

  • Silicon Carbide Micro Electromechanical Systems for Harsh Environments Book Detail

  • Author : Rebecca Cheung
  • Release Date : 2006
  • Publisher : Imperial College Press
  • Genre : Technology & Engineering
  • Pages : 193
  • ISBN 13 : 1860949096
  • File Size : 13,13 MB
DOWNLOAD BOOK

Silicon Carbide Micro Electromechanical Systems for Harsh Environments by Rebecca Cheung PDF Summary

Book Description: This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Sample Chapter(s). Chapter 1: Introduction to Silicon Carbide (SIC) Microelectromechanical Systems (MEMS) (800 KB). Contents: Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung); Deposition Techniques for SiC MEMS (C A Zorman et al.); Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996OCo2002 (L M Porter & F A Mohammad); Dry Etching of SiC (S J Pearton); Design, Performance and Applications of SiC MEMS (S Zappe). Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research."

Disclaimer: www.yourbookbest.com does not own Silicon Carbide Micro Electromechanical Systems for Harsh Environments books pdf, neither created or scanned. We just provide the link that is already available on the internet, public domain and in Google Drive. If any way it violates the law or has any issues, then kindly mail us via contact us page to request the removal of the link.

SiC MEMS For Harsh Environments

SiC MEMS For Harsh Environments

File Size : 64,64 MB
Total View : 6060 Views
DOWNLOAD

This document is the final technical report for the SiC MEMS for Harsh Environments in-house research program jointly coordinated between AFRL/MNMF and AFRL/MLP