Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10

Released on by R. Ekwal Sah
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  • Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10 Book Detail

  • Author : R. Ekwal Sah
  • Release Date : 2009
  • Publisher : The Electrochemical Society
  • Genre : Dielectric films
  • Pages : 871
  • ISBN 13 : 1566777100
  • File Size : 33,33 MB
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Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10 by R. Ekwal Sah PDF Summary

Book Description: The issue of ECS Transactions contains papers presented at the Tenth International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics held in San Francisco on May 24-29, 2009. The papers address a very wide range of fabrication and characterization techniques, and applications of thin dielectric films in microelectronic and optoelectronic devices. More specific topics addressed by the papers include reliability, interface states, gate oxides, passivation, and dielctric breakdown.

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