Spectroscopic Ellipsometry

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  • Spectroscopic Ellipsometry Book Detail

  • Author : Hiroyuki Fujiwara
  • Release Date : 2007-09-27
  • Publisher : John Wiley & Sons
  • Genre : Technology & Engineering
  • Pages : 388
  • ISBN 13 : 9780470060186
  • File Size : 63,63 MB

Spectroscopic Ellipsometry by Hiroyuki Fujiwara PDF Summary

Book Description: Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

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Spectroscopic Ellipsometry

Spectroscopic Ellipsometry

File Size : 56,56 MB
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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principle

Spectroscopic Ellipsometry

Spectroscopic Ellipsometry

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Total View : 2689 Views
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Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thicknes