Sputtering by Particle Bombardment

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  • Sputtering by Particle Bombardment Book Detail

  • Author : Rainer Behrisch
  • Release Date : 2007-07-30
  • Publisher : Springer Science & Business Media
  • Genre : Technology & Engineering
  • Pages : 527
  • ISBN 13 : 3540445005
  • File Size : 79,79 MB

Sputtering by Particle Bombardment by Rainer Behrisch PDF Summary

Book Description: This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.

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Sputtering by Particle Bombardment

Sputtering by Particle Bombardment

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This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic a

Sputtering by Particle Bombardment III

Sputtering by Particle Bombardment III

File Size : 47,47 MB
Total View : 9906 Views
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Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many