Temperature Measurement during Millisecond Annealing

Released on by Denise Reichel
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  • Temperature Measurement during Millisecond Annealing Book Detail

  • Author : Denise Reichel
  • Release Date : 2016-01-07
  • Publisher : Springer
  • Genre : Science
  • Pages : 128
  • ISBN 13 : 365811388X
  • File Size : 96,96 MB
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Temperature Measurement during Millisecond Annealing by Denise Reichel PDF Summary

Book Description: Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

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