The Design and Construction of a High Density Plasma Source

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High Density Plasma Sources

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This book presents a comprehensive description of the most promising high density plasma sources operated at low and intermediate pressures which are used, or c

High Density Plasma Sources

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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing,

Design of High Density Plasma Sources for Materials Processing

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High-Density Plasma Source for Large-Area Chemical Vapor Deposition of Diamond Films

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During this program Science Research Laboratory (SRL) and the Plasma Processing Group in the Department of Chemical Engineering at MIT are developing a large-ar