Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

Released on by Toan Dinh
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  • Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors Book Detail

  • Author : Toan Dinh
  • Release Date : 2018-10-05
  • Publisher : Springer
  • Genre : Technology & Engineering
  • Pages : 122
  • ISBN 13 : 9811325715
  • File Size : 73,73 MB
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Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors by Toan Dinh PDF Summary

Book Description: This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.

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Thermal Sensors

Thermal Sensors

File Size : 48,48 MB
Total View : 6014 Views
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This book is a comprehensive guide to both the fundamentals of thermal sensors and their advanced functions. Key topics include sensor materials, CMOS-compatibl