Ultra Clean Processing of Silicon Surfaces V

Released on by Marc Heyns
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  • Ultra Clean Processing of Silicon Surfaces V Book Detail

  • Author : Marc Heyns
  • Release Date : 2001-01-02
  • Publisher : Trans Tech Publications Ltd
  • Genre : Technology & Engineering
  • Pages : 340
  • ISBN 13 : 3035707006
  • File Size : 48,48 MB
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Ultra Clean Processing of Silicon Surfaces V by Marc Heyns PDF Summary

Book Description: Volume is indexed by Thomson Reuters CPCI-S (WoS). The proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces cover all aspects of ultra-clean Si-technology: cleaning, contamination control, Si-surface chemistry and topography, and its relationship to device performance and process yield. New areas of concern include: cleaning at the interconnect level, resist strip and polymer removal (dry and wet), cleaning and contamination aspects of metallization, wafer backside cleaning and cleaning after Chemical-Mechanical-Polishing (CMP).

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