Ultra Clean Processing of Silicon Surfaces VII

Released on by Paul Mertens
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  • Ultra Clean Processing of Silicon Surfaces VII Book Detail

  • Author : Paul Mertens
  • Release Date : 2005-04-01
  • Publisher : Trans Tech Publications Ltd
  • Genre : Technology & Engineering
  • Pages : 398
  • ISBN 13 : 3038130257
  • File Size : 47,47 MB
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Ultra Clean Processing of Silicon Surfaces VII by Paul Mertens PDF Summary

Book Description: Volume is indexed by Thomson Reuters CPCI-S (WoS). This book is sub-divided into 10 different topical sections; each dealing with important issues in surface cleaning and preparation.

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