Updates in Advanced Lithography

Released on by Sumio Hosaka
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  • Updates in Advanced Lithography Book Detail

  • Author : Sumio Hosaka
  • Release Date : 2013-07-03
  • Publisher : BoD – Books on Demand
  • Genre : Science
  • Pages : 264
  • ISBN 13 : 9535111752
  • File Size : 5,5 MB
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Updates in Advanced Lithography by Sumio Hosaka PDF Summary

Book Description: Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications.

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Updates in Advanced Lithography

Updates in Advanced Lithography

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Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches

Lithography Process Control

Lithography Process Control

File Size : 13,13 MB
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This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both