Chemistry of Atomic Layer Deposition

Released on by Seán Thomas Barry
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  • Chemistry of Atomic Layer Deposition Book Detail

  • Author : Seán Thomas Barry
  • Release Date : 2021-11-08
  • Publisher : Walter de Gruyter GmbH & Co KG
  • Genre : Technology & Engineering
  • Pages : 113
  • ISBN 13 : 3110712539
  • File Size : 29,29 MB
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Chemistry of Atomic Layer Deposition by Seán Thomas Barry PDF Summary

Book Description: This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

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