Flash Lamp Annealing

Released on by Lars Rebohle
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  • Flash Lamp Annealing Book Detail

  • Author : Lars Rebohle
  • Release Date : 2019-07-27
  • Publisher : Springer
  • Genre : Technology & Engineering
  • Pages : 288
  • ISBN 13 : 3030232999
  • File Size : 79,79 MB
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Flash Lamp Annealing by Lars Rebohle PDF Summary

Book Description: This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.

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Flash Lamp Annealing

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This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduc

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