Design and Analysis of a MEMS Fabry-Perot Pressure Sensor

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  • Design and Analysis of a MEMS Fabry-Perot Pressure Sensor Book Detail

  • Author : Sohrab Jay Haghighat
  • Release Date : 2007
  • Publisher :
  • Genre :
  • Pages :
  • ISBN 13 :
  • File Size : 67,67 MB

Design and Analysis of a MEMS Fabry-Perot Pressure Sensor by Sohrab Jay Haghighat PDF Summary

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Understanding MEMS

Understanding MEMS

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The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding