Dry Etching Technology for Semiconductors

Dry Etching Technology for Semiconductors

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This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniat

Atomic Layer Processing

Atomic Layer Processing

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Learn about fundamental and advanced topics in etching with this practical guide Atomic Layer Processing: Semiconductor Dry Etching Technology delivers a hands-

Dry Etching for Microelectronics

Dry Etching for Microelectronics

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This volume collects together for the first time a series of in-depth, critical reviews of important topics in dry etching, such as dry processing of III-V comp

Dry Etching for VLSI

Dry Etching for VLSI

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This book has been written as part of a series of scientific books being published by Plenum Press. The scope of the series is to review a chosen topic in each

Semiconductor IC Plasma Dry Etching Process

Semiconductor IC Plasma Dry Etching Process

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Semiconductor market value of 2018 was around 468.8 billion US dollars. It is increased for about 13.7% than year 2017. For 2019, it is estimated decrease about