Electron and Ion Optics

Released on by Miklos Szilagyi
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  • Electron and Ion Optics Book Detail

  • Author : Miklos Szilagyi
  • Release Date : 2012-12-06
  • Publisher : Springer Science & Business Media
  • Genre : Technology & Engineering
  • Pages : 550
  • ISBN 13 : 1461309239
  • File Size : 14,14 MB
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Electron and Ion Optics by Miklos Szilagyi PDF Summary

Book Description: The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.

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Electron and Ion Optics

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Introduction to Electron and Ion Optics

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Introduction to Electron and Ion Optics provides the theoretical background needed to understand the subject matter and even be helpful in laboratory works. Sev

Principles of Electron Optics

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The three volumes in the PRINCIPLES OF ELECTRON OPTICS Series constitute the first comprehensive treatment of electron optics in over forty years. While Volumes