Integrated Electrostatically- and Piezoelectrically-Transduced Contour-Mode MEMS Resonator on Silicon-on-Insulator (SOI) Wafer

Released on by I-Tsang Wu
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  • Integrated Electrostatically- and Piezoelectrically-Transduced Contour-Mode MEMS Resonator on Silicon-on-Insulator (SOI) Wafer Book Detail

  • Author : I-Tsang Wu
  • Release Date : 2014
  • Publisher :
  • Genre :
  • Pages :
  • ISBN 13 :
  • File Size : 71,71 MB
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Integrated Electrostatically- and Piezoelectrically-Transduced Contour-Mode MEMS Resonator on Silicon-on-Insulator (SOI) Wafer by I-Tsang Wu PDF Summary

Book Description: This dissertation presents the design, fabrication, characterization and experimental analysis of two types of micro-mechanical resonators. Piezoelectrically- and electrostatically-transduced micromechanical resonators will both be shown. Both types of resonator will be fabricated in the same micro-fabrication run, which makes the comparison between the two much more impartial. The impacts of substrate's resistivity over the device performances will also be studied. Among the most significant results, this dissertation also presents several ideas that are enabled by the use of silicon-on-insulator (SOI) wafer. A novel single-mask fabrication process that can produce capacitive resonator with nano-meter gap is demonstrated. The concept of dual-transduced micro-mechanical resonator is introduced by combining both piezoelectric and capacitive based resonators. Finally, frequency tuning of MEMS resonator are explored and detailed in this work as well.

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