Microsystem Technology

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  • Microsystem Technology Book Detail

  • Author : Wolfgang Menz
  • Release Date : 2008-07-11
  • Publisher : John Wiley & Sons
  • Genre : Technology & Engineering
  • Pages : 512
  • ISBN 13 : 3527613013
  • File Size : 15,15 MB

Microsystem Technology by Wolfgang Menz PDF Summary

Book Description: This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

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