Ion Implantation Technology - 92

Released on by D.F. Downey
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  • Ion Implantation Technology - 92 Book Detail

  • Author : D.F. Downey
  • Release Date : 2012-12-02
  • Publisher : Elsevier
  • Genre : Technology & Engineering
  • Pages : 716
  • ISBN 13 : 0444599800
  • File Size : 53,53 MB
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Ion Implantation Technology - 92 by D.F. Downey PDF Summary

Book Description: Ion implantation technology has made a major contribution to the dramatic advances in integrated circuit technology since the early 1970's. The ever-present need for accurate models in ion implanted species will become absolutely vital in the future due to shrinking feature sizes. Successful wide application of ion implantation, as well as exploitation of newly identified opportunities, will require the development of comprehensive implant models. The 141 papers (including 24 invited papers) in this volume address the most recent developments in this field. New structures and possible approaches are described. The implications for ion implantation technology as well as additional observations of needs and opportunities are discussed. The volume will be of value to all those who are interested in acquiring a more complete understanding of the current developments in ion implantation processes and comprehensive implant models.

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Ion Implantation Technology - 92

Ion Implantation Technology - 92

File Size : 54,54 MB
Total View : 8027 Views
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Ion implantation technology has made a major contribution to the dramatic advances in integrated circuit technology since the early 1970's. The ever-present nee

Ion Implantation Technology - 94

Ion Implantation Technology - 94

File Size : 57,57 MB
Total View : 929 Views
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The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas