Ion Implantation Technology - 94

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  • Ion Implantation Technology - 94 Book Detail

  • Author : S. Coffa
  • Release Date : 1995-05-16
  • Publisher : Newnes
  • Genre : Science
  • Pages : 1031
  • ISBN 13 : 044459972X
  • File Size : 1,1 MB

Ion Implantation Technology - 94 by S. Coffa PDF Summary

Book Description: The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters. The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.

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Ion Implantation Technology - 94

Ion Implantation Technology - 94

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The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas

Ion Implantation Technology-94

Ion Implantation Technology-94

File Size : 89,89 MB
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The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas

Ion Implantation Technology - 92

Ion Implantation Technology - 92

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Ion implantation technology has made a major contribution to the dramatic advances in integrated circuit technology since the early 1970's. The ever-present nee

Ion Implantation Science and Technology

Ion Implantation Science and Technology

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Ion Implantation Science and Technology: Second Edition, just like the first edition, serves as both an introduction and tutorial to the science, techniques, an