Low Dielectric Constant Materials for IC Applications

Released on by Paul S. Ho
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  • Low Dielectric Constant Materials for IC Applications Book Detail

  • Author : Paul S. Ho
  • Release Date : 2012-12-06
  • Publisher : Springer Science & Business Media
  • Genre : Technology & Engineering
  • Pages : 323
  • ISBN 13 : 3642559085
  • File Size : 21,21 MB
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Low Dielectric Constant Materials for IC Applications by Paul S. Ho PDF Summary

Book Description: Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for

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Low and High Dielectric Constant Materials

Low and High Dielectric Constant Materials

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Contains papers from a May 2000 symposium, representing the state of the art in areas of dielectric materials science and process integration. Papers are arrang