Physics and Technology of High-k Gate Dielectrics 4

Released on by Samares Kar
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  • Physics and Technology of High-k Gate Dielectrics 4 Book Detail

  • Author : Samares Kar
  • Release Date : 2006
  • Publisher : The Electrochemical Society
  • Genre : Dielectrics
  • Pages : 565
  • ISBN 13 : 1566775035
  • File Size : 33,33 MB
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Physics and Technology of High-k Gate Dielectrics 4 by Samares Kar PDF Summary

Book Description: This issue covers, in detail, all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.

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